AFM反馈系统仿真模型的建立及实验
王艳艳1，2*
（1. 天津职业技术师范大学 天津市信息传感与智能控制重点实验室，天津300222，2. 天津大学 精密测试技术及仪器国家重点实验室，天津300072）
摘 要 原子力显微镜（AFM）广泛应用于纳米尺度的成像和操纵，其较低的扫描速度严重影响了测试的效率。为此，许多研究人员通过设计先进的Z向控制算法改善系统的响应速度，达到提高扫描速度的目的，而先进的控制算法的实现首先需要对AFM的Z向反馈系统进行建模。为此，本文提出一种简单准确的系统辨识方法，通过对系统输入输出数据的分析，得到AFM的Z向反馈系统模型，并利用该模型验证先进控制算法的控制性能。实验表明该方法能为先进控制算法的设计和实现建立有效的仿真模型。
关键词 原子力显微镜；系统辨识；仿真模型
中图分类号：TP391.9；TH742 文献标识码：A doi:10.3969/j.issn.1000-6281.2016.03.006
Simulation system of the atomic force microscopy in Z direction
WANG Yan-yan1，2*
（1. Tianjin Key Laboratory of Information Sensing and Intelligent Control，Tianjin Universityof Technology and Education，Tianjin300222；2. State Key Laboratory of Precision Measuring Technology and Instruments，Tianjin University，Tianjin 300072，China）
Abstract Atomic force microscopy (AFM) is a powerful tool in nanoscale imaging and manipulation. Many efforts have been made to improve its scanning rate by implementing many advanced controllers. The design of the controllers requires the achievement of the model of the AFM system, especially in the Z direction. The This paper proposes a simple system identification method to estimate the model of the AFM in the Z direction by utilizing the experimental data. The simulation system is established to obtain the performance of controllers. Experiments demonstratethat the simulation system is effective and helpful for the successful design and implementation of the controllers in the actual AFM system.
Keywords atomic force microscopy；system identification；simulation
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