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扫描电镜中透射-反射式STEM明场成像装置的研制及应用

赵学平，侯小虎*，刘飞，梁绍波，崔晓明，白朴存
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2024年 第43卷 第2期: 1000-6281（2024）02-208-07     下载地址：

扫描电镜中透射-反射式STEM明场成像装置的研制及应用

赵学平，侯小虎*，刘飞，梁绍波，崔晓明，白朴存

  1. 内蒙古工业大学测试中心，内蒙古呼和浩特010051；2. 内蒙古工业大学材料科学与工程学院，内蒙古呼和浩特010051)

摘  要 本文研制了一套透射-反射式扫描透射（STEM）明场成像装置，该装置使用背散射电子探头接收经过铂片反射的透射电子信号，可安装在FEI Quanta FEG系列扫描电镜中实现STEM明场成像。分别以埃洛石、Au@ZIF-8纳米颗粒和喷金乳胶标样验证自制STEM明场成像装置的实用性。结果表明：埃洛石STEM明场像的衬度与透射电镜中STEM明场像一致，管腔和管壁具有明显的衬度差异，可以清晰辨识管腔结构；在Au@ZIF-8纳米颗粒的STEM明场像中，Au颗粒衬度较暗，ZIF-8衬度较亮，通过两者之间的衬度差异可以观察到核壳结构；喷金乳胶标样上纳米金颗粒之间可识别的最小距离为2.03 nm，进一步验证了自制STEM明场成像装置具有较高的分辨率。

关键词  扫描电镜；扫描透射电子显微镜；明场像；成像装置；图像衬度

中图分类号：TN16      文献标识码：A            doi:10.3969/j.issn.1000-6281.2024.02.011   

 

Development and application of scanning transmission electron microscopy bright field imaging device

ZHAO Xueping1, HOU Xiaohu1*, LIU Fei1, LIANG Shaobo2, CUI Xiaoming2, BAI Pucun2

(1. Instrumental Analysis & Research Center, Inner Mongolia University of Technology, Hohhot Inner Mongolia 010051; 2. College of Materials Science and Engineering, Inner Mongolia University of Technology, Hohhot Inner Mongolia 010051, China)

Abstract  A transmission-reflection scanning transmission electron microscopy (STEM) bright field (BF) imaging device was developed. The device used a back-scattering electron detector (BSED) to receive transmission electron signals reflected by platinum plates, and was installed in FEI Quanta FEG series scanning electron microscopy to realize the STEM-BF imaging. The practicability of self-made STEM-BF imaging device was verified by checking halloysite, Au@ZIF-8 nanoparticles and Au nanoparticles. The results showed that the contrast of STEM-BF image of halloysite in SEM was consistent with that of STEM-BF image in TEM. The lumen and wall had obvious contrast difference, clearly identifying the lumen structure. Revealed by the STEM-BF image of Au@ZIF-8 nanoparticles, the contrast of Au particles was darker and that of ZIF-8 was brighter, and the core-shell structure was observed through the contrast difference. The minimum discernible distance between Au nanoparticles on carbon film of standard sample was 2.03 nm, further demonstrating that the self-made STEM-BF imaging device had a high resolution.

Keywords  scanning electron microscopy (SEM); scanning transmission electron microscopy (STEM); bright field (BF) image; imaging device; image contrast

 

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