多束电子光学系统的研究现状与发展

多束电子光学系统的研究现状与发展

张利新，赵伟霞，陈代谢，张雨露，刘俊标^*，韩  立^*

（1.中国科学院电工研究所，微纳加工技术与智能电气设备研究部,北京 100190；2.中国科学院大学，电子电气与通信工程学院，北京100049；3. 中国科学院条件保障与财务局，北京 100864）

摘  要  本文对多束电子光学系统的国内外研究现状进行了详细调研，总结了各个系统的特点以及应用领域。多束电子光学系统在生命科学领域、材料领域以及半导体领域具有广泛的应用价值，本文指出了我国需要开展这方面研究的必要性。同时，本文介绍了国内在多束电子光学领域的研究进展。

关键词  电子光学；多束电子光学；高通量；扫描电子显微镜

中图分类号：TN14；TN16；O463   文献标识码：A    doi:10.3969/j.issn.1000-6281.2023.02.014

The current states and progress of multi-beam electron optical systems

ZHANG Li-xin¹, ZHAO Wei-xia¹, CHEN Dai-xie³, ZHANG Yu-lu^1,2, LIU Jun-biao^1，2*, HAN Li^1,2*

（1.Research Department of Micro-nano Fabrication Technology and Intelligent Electronic Devices, Institute of Electrical Engineering Chinese Academy of Sciences, Beijing 100190;  2.School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049;  3.Bureau of Facility Support and Budget，Chinese Academy of Sciences, Beijing 100864, China )

Abstract  In this paper, the research status of multi-beam electron optical systems at home and abroad was investigated in detail, and the characteristics and application fields of each system were summarized. Multi-beam electron optical systems are widely used in the fields of life science, materials and semiconductors etc. It is pointed out that there is a necessity to conduct the related research in this field. At the same time, the domestic research progress in the field of multi-beam electron optics were introduced.

Keywords  electron optics；multi-beam electron optics；high throughput；scanning electron microscope

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