扫描电镜用于防样品氧化样品台的设计及制备
陈 茜，李少杰，丛 铁，刘 峰，魏丽娟扫描电镜用于防样品氧化样品台的设计及制备
陈 茜，李少杰，丛 铁，刘 峰，魏丽娟
（1.大连理工大学盘锦校区分析测试中心， 辽宁 盘锦124221；2. 大连理工大学化工学院， 辽宁 盘锦 124221）
摘 要 扫描电镜是表征材料表面形貌特征的重要分析仪器。部分样品化学活性高，在空气中易氧化影响样品表面微观形貌。本文设计并制备了一种扫描电镜用防样品氧化样品台，使样品从手套箱转移至扫描电镜腔体中不暴露在空气中，有效地保护了样品。使用防样品氧化样品台获得的锂电极和钠电极表面形貌明显改善，能谱分析样品表面的氧含量减少。该样品台的制备简单易操作，有效的减缓易氧化样品的氧化速度，且可以根据研究者实验需求更换不同尺寸的样品台。
关键词 扫描电镜；易氧化样品；防样品氧化样品台
中图分类号：G304；TG115.21+5.3；O484.5；TH879；O631.3+1 文献标识码：B doi:10.3969/j.issn.1000-6281.2023.03.010
Design and fabrication of anti-oxidation sample stage for SEM
CHEN Xi1, LI Shao-jie1, CONG Tie2, LIU Feng1, WEI Li-juan1
(1.Instrumental Analysis & Research Center, Dalian University of Technology, Panjin Liaoning 12422; 2.School of Chemical Engineering, Dalian University of Technology, Panjin Liaoning 124221, China)
Abstract Scanning electron microscopy (SEM) is an important instrument to characterize the surface morphology of materials. There are some samples that they have a high chemical activity and are easy to be oxidized in air. In this paper, an anti-oxidation sample stage for SEM was designed and fabricated. The prepared sample was transferred from a glove box to the SEM chamber without being exposed to the air in the whole process. The sample is effectively protected to avoid oxidation. The surface morphology of lithium and sodium electrodes was significantly improved by using our fabricated anti-oxidation sample stage. The oxygen content in samples was greatly reduced according to the analysis by EnergyDisperseSpectroscopy.It is simple and easy tofabricate the anti-oxidation sample stage. The oxidation rate of easily oxidized samples can be effectively decreased. The size of the anti-oxidation stage can be customized according to the researchers’ experimental demands.
Keywords scanning electrode microscope；oxidizable sample；anti-oxidation sample stage
“全文下载请到同方知网，万方数据库或重庆维普等数据库中下载！”