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电解双喷制备多组元合金的TEM薄膜

姜贝贝，董 勇，钟紫珊，吴焱学，林微甜
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2023年 第42卷 第3期: 1000-6281（2023）03-338-14      下载地址：

电解双喷制备多组元合金的TEM薄膜

                                     姜贝贝，董  勇，钟紫珊，吴焱学，林微甜

                   （1. 广东工业大学分析测试中心，广东广州510006；2. 广东工业大学材料与能源学院，广东广州510006）

摘   要   电解双喷减薄/抛光技术是制备金属类TEM薄膜最常用的方法。获得表面光亮清洁，中心穿孔，绕穿孔边缘有较大薄区的优质TEM薄片则需要合适的电解双喷参数。本文利用电解双喷仪制备多组元合金的TEM薄片，包括FeCrNi系奥氏体不锈钢，模具钢，AlFeCrNi(Co/W/V/Cu)系的高熵合金，并通过光学和透射电镜观察穿孔情况和材料内部析出相、成分分布、相界面原子分布、位错等信息，探讨电解双喷过程中电解液的成分、温度，电解双喷的参数（电压/电流、流速）和样品厚度等对双喷效果的影响。总结了各种材料最佳的电解双喷参数，对于具有复杂析出相的钢，需采用不同的电解液来实现TEM薄片的制备。而新型高熵合金则需要调试温度、电压/电流等参数，来获得清晰的两相共格界面，并避免腐蚀产物的干扰。

关键词 电解双喷；TEM薄膜；钢；高熵合金

中图分类号：TB31；TG175      文献标识码：B     doi:10.3969/j.issn.1000-6281.2023.03.009

 

                    The preparation of high-quality TEM sample based on multicomponent alloys via a double-jet electropolishing technique

         JIANG Bei-bei1，DONG Yong2，ZHONG Zi-shan2，WU Yan-xue1，LIN Wei-tian1

(1. Analysis and Test Center, Guangdong University of Technology, Guangzhou Guangdong 510006；2. School of Materials and Energy, Guangdong University of Technology, Guangzhou Guangdong 510006, China)

Abstract   The twin-jet electropolishing technique is the most frequently usedmethod for the preparation of metallic transmission electron microscope (TEM) films. The suitable parameters for twin-jet electropolishing technique are needed to obtain high-quality TEM specimens with perforation in the center and uniformly thin edges around the hole.In this paper, the twin-jet electropolisher was used to prepareTEM samples of multicomponent alloys. These alloys include

FeCrNi austenitic stainless steel, die steel and AlFeCrNi(Co/W/V/Cu) series high-entropy alloys. The details of precipitation particles, element distribution, atomic arrangement at the interface, dislocation and staking faults were investigated by optical microscopy (OM) and transmission electron microscopy (TEM). The effects of the composition and temperature of the electrolyte, the voltage/current, the flow rate and the thickness on TEM samples preparation were studied during twin-jet electropolishing process. The optimal parameters for different alloys are summarized.

Keywords  twin-jet electropolishing；TEM thin films；steels；high-entropy alloys

 

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