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透射电子显微镜原位低温高频信号样品杆的研制

裴 科，张瑞轩，杨利廷，赵雪冰，车仁超*
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2023年 第42卷 第3期: 1000-6281（2023）03-325-085     下载地址：

透射电子显微镜原位低温高频信号样品杆的研制

裴  科，张瑞轩，杨利廷，赵雪冰，车仁超*

（1.先进材料实验室，上海市分子催化和功能材料重点实验室，材料科学系，复旦大学，上海200438；2.芯片与系统前沿技术研究院，复旦大学，上海200438；3.计算材料联合研究中心，之江实验室，杭州 311100）

摘  要 透射电子显微镜原位测试技术是未来电子显微学发展的聚焦方向，尤其是多种原位条件复合的特种样品杆，是目前科学研究急需的重要设备。本文简述了原位低温高频脉冲信号样品杆的设计方案，通过样品杆和芯片设计，实现样品在低温、电流、磁场和高频脉冲信号作用下的原位测试，可以实现100~300 K的连续变温，实现10 MHz~2 GHz高频脉冲信号的通入，可对微纳尺度功能材料在多种物理场作用下的结构与性质变化进行深入的分析。

关键词 透射电子显微镜；原位样品杆；高频脉冲信号；芯片设计

中图分类号：TG14；O469；O59  文献标识码：A   doi:10.3969/j.issn.1000-6281.2023.03.007

 

Fabrication of in-situ cooling TEM holder with high-frequency signal

PEI Ke1，ZHANG Rui-xuan1，YANG Li-ting1，ZHAO Xue-bing2，CHE Ren-chao1，3*

  1. Laboratory of Advanced Materials, Shanghai Key Lab of Molecular Catalysis and Innovative Materials, Department of Materials Science, Fudan University, Shanghai 200438; 2. Frontier Institute of Chip and System, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 200438; 3. Joint-Research Center for Computational Materials, Zhejiang Laboratory, Hangzhou Zhejiang 311100, China）

Abstract   The in-situ technology based on transmission electron microscopy is an important future development of electron microscopy. The multifunctional holder is the urgent equipment for scientific research. In this paper, the design of in-situ cooling TEM holder with high-frequency signal is presented. Through the design of holder and chips, in-situ experiments are realized by coupling the external fields of cooling, magnetic field and high-frequency current signal. The temperature can be modulated from 100 K to 300 K. The high-frequency signal can be tuned from 10 MHz to 2 GHz. The relation between microstructure and property of micro- and nano-scale functional materials can be built under multi-physical fields.

Keywords   transmission electron microscopy；in-situholder；high-frequency signal；chip design

 

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