真空调频原子力显微镜高精度扫描器设计与校准
温 阳，陈纵横，王 博，冯 婕，舒鹏丽，郭 强，温焕飞，唐 军，菅原康弘，马宗敏*，刘 俊
（1.动态测试技术国家重点实验室， 山西 太原 030051；2.中北大学仪器与电子学院， 山西 太原030051；3.山西省重点实验室， 山西 太原030051；4.大阪大学， 日本 大阪府565-0871 ）
摘 要 原子力显微镜（AFM）是一种表征样品表面的物理化学信息的精密仪器，AFM高精度扫描器是整个测量与表征系统的核心部件，其性能直接影响整个测量系统的性能，因此对原子力显微镜高精度扫描器的研究具有重要意义。本文介绍了调频原子力显微镜（FM-AFM）、AFM精密扫描平台以及扫描器的基本原理，提出了更为精确的扫描器设计模型，并将根据真空FM-AFM实际需要设计的扫描器搭载到自主研发的超高真空AFM系统中进行测试，结果表明了设计模型的精确性。随后，根据实验测试结果进行了相应的校准，提出了一种基于图像进行非线性校准的简易方法。最后，对云母样品表面形貌进行了测量，得到了云母台阶。
关键词 调频原子力显微镜；AFM精密扫描平台；压电扫描器；滞后效应；非线性校准
中图分类号：TH742；TH73 文献标识码：A doi:10.3969/j.issn.1000-6281.2023.03.006
Design and calibration of high precision scanner for vacuum FM atomic force microscope
WEN Yang1，2，3，CHEN Zong-heng1，2，3，WANG Bo1，2，3，FENG Jie1，2，3，SHU Peng-li1，2，3，
GUO Qiang1，2，3，WEN Huan-fei1，2，3，TANG Jun1，2，3，Sugawara Y4，MA Zong-min1，2，3*，LIU Jun1，2，3
(1.State Key Laboratory of Dynamic Testing Technology，North University of China，Taiyuan Shanxi 030051，China；2. School of Instrument and Electronics，North University of China, Taiyuan Shanxi 030051，China；3.Shanxi Provincial Key Laboratory，North University of China，Taiyuan Shanxi 030051, China；4.Osaka University，Osaka Japan 565-0871，Japan)
Abstract Atomic force microscope (AFM) is a precise instrument for obtaining the physical and chemical information of a sample surface. The high-precision scanner of AFM is the core component, which directly affects the performance of the entire system. Therefore, the research on the high-precision scanner of atomic force microscope is of great importance. The basic principle is introduced for frequency modulated atomic force microscope (FM-AFM), AFM precision scanning platform and scanner. A more accurate scanner design model is proposed. The scanner designed according to the actual needs of vacuum FM-AFM is carried into the self-developed ultra-high vacuum AFM system for testing. The results show that the design model is accurate. According to experimental results, a simple nonlinear calibration method based on image is proposed. Finally, the surface morphology of the mica sample is measured, and the mica steps are obtained.
Keywords frequency modulated atomic force microscope；AFM precision scanning platform；piezoelectric scanner；lagging effect；nonlinear calibration
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