基于SU-8010场发射扫描电镜的个性化测试定制——管理者的实践与探索
陈 芳，丁晓坤，裘雅渔基于SU-8010场发射扫描电镜的个性化测试定制——管理者的实践与探索
陈 芳，丁晓坤，裘雅渔
(浙江大学 化学系，浙江 杭州310027)
摘 要 探索不同类别样品的表征参数从而得到高品质的测试数据以及提高测试效率，是电镜管理者一直追求的目标。本文研制的场发射扫描电子显微镜样品快速定位系统，通过对每一个样品的精确定位，减少找样品的时间，使电镜使用效率提高13.6%；通过制备薄样品及减少电子束与基底材料的相互作用，相比传统分析方法，提高了纳米颗粒元素相对定量分析准确性；通过搭建导电通路、增加样品与导电胶接触面和不同的镀膜方式以及合适的探头选择，得到不导电厚样品的高清晰图像。此类研究可为电镜工作者提高管理质量提供一定参考。
关键词 扫描电镜；个性化定制；测试效率；定量分析；不导电样品
中图分类号：TN16；TG115.21+5.3；O657.62 文献标识码：Adoi:10.3969/j.issn.1000-6281.2022.03.016
Practice and exploration of managers based on personalized customization of SU-8010 FESEM
CHEN Fang，DING Xiao-kun，QIU Ya-yu
(Department of Chemistry，Zhejiang University，hangzhou Zhejiang 310027，China)
Abstract Exploring the characteristics of various types of samples to obtain high quality test data and improve test efficiency is the goal that electron microscope researchers have been pursuing. In this study, the establishment of a fast positioning system for field emission scanning electron microscopy, which can accurately locate each sample, reduces the time required to search for samples and enhances electron microscopy efficiency by 13.6%. By preparing thin samples and minimizing the interaction between the electron beam and the substrate material, the relative quantitative analysis of the accuracy of nanoparticle elements can be improved as compared to the traditional analysis method. To obtain high resolution images of the non-conductive thick sample, various methods to increase the conductivity and probe selection were applied. This study provides researchers with helpful instructions to obtain high-quality images and data.
Keywords scanning electron microscopy；personalized customization；efficiency of testing；quantitative analysis；non-conductive sample
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