基于FIB加工和SEM-EDS技术联用对共格BCC/B2高熵合金的元素分布表征分析

基于FIB加工和SEM-EDS技术联用对共格BCC/B2高熵合金的元素分布表征分析

史淑艳，王成林，戚  琳，马  跃，邹龙江

（大连理工大学材料科学与工程学院，辽宁 大连  116024 ）

摘  要   BCC/B2高熵合金中体心立方结构（body centered cube, BCC）纳米粒子影响其软磁性能和高温力学性能。然而，扫描电子显微镜-能量色散谱仪（scanning electron microscopy - X-ray energy dispersive spectroscopy, SEM-EDS）难以表征BCC纳米粒子的元素分布。本文利用聚焦离子束（focused ion beam，FIB）和SEM-EDS联用，制备BCC/B2高熵合金的纳米尺度薄片，并对其元素分布进行了研究。结果表明，Al_17.65Co_47.06Fe_23.53Cr_11.76高熵合金微观组织是由B2相与共格的BCC相构成，其中BCC粒子约为20~40 nm。对比SEM-EDS对块体试样和FIB制备的纳米尺度的薄片元素分布结果，FIB制备的纳米薄片提高了EDS的分辨率，BCC纳米粒子富集Cr元素，且B2基体相富集Al、Co和Fe元素。电子的加速电压和束流强度影响纳米薄片中BCC纳米粒子元素分布表征结果的准确性，其中30 kV 6.4 nA下元素分布表征结果的准确度最高。

关键词 高熵合金；纳米颗粒；元素分布；聚焦离子束；扫描电子显微镜-能量色散谱仪

中图分类号：TB331；TG113；TG115. 21  文献标识码：Adoi:10.3969/j.issn.1000-6281.2022.03.006

Elemental distribution of BCC nanoparticles in coherent BCC/B2 high entropy alloy by focused ion beam processing and scanning electron microscopy

SHI Shu-yan, WANG Cheng-lin, QI Lin, MA Yue, ZOU Long-jiang

（School of Materials Science and Engineering, Dalian University of Technology, Liaoning Dalian 116024, China）

Abstract    In BCC/B2 high entropy alloy, body centered cube (BCC) nanoparticles affect the soft magnetic properties and high temperature mechanical properties. However, the elemental distribution of BCC nanoparticles is difficult to be characterized by scanning electron microscope-energy dispersion spectroscopy (SEM-EDS). In this paper, focused ion beam (FIB) and SEM-EDS were used to prepare nanoscale sheet of BCC/B2 high entropy alloy, and the elemental distribution of the nanoscale sheet was studied. The microstructure of Al_17.65Co_47.06Fe_23.53Cr_11.76 high entropy alloy is coherent with BCC/B2 phases, and the size distribution of BCC particles is 20-40 nm. When SEM-EDS was used to analyze the elemental distribution of the block sample and the nanoscale sheet sample prepared by FIB, the nanosheet prepared by FIB improves the resolution of EDS, BCC nanoparticles are enriched in Cr, and B2 matrix is enriched in Al, Co and Fe. The accelerating voltage and beam intensity affect the accuracy of the element distribution results of BCC nanoparticles in the nanosheets, and the highest accuracy of the element distribution results is obtained at 30 kV 6.4 nA.

Keywords   high entropy alloy; nano-particles; elemental distribution; focused ion beam; scanning electron microscope-energy dispersion spectrometer

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