扫描电镜图像锯齿形毛刺的抑制与消除
彭 宇扫描电镜图像锯齿形毛刺的抑制与消除
彭 宇
（浙江大学 建筑工程学院, 浙江 杭州310058）
摘 要 环境中的振动、电场与磁场等干扰常使扫描电镜图像产生锯齿形毛刺。本文研究了锯齿形毛刺的规律，从调节扫描速度与扫描角度两个方面对其进行了抑制与消除。研究发现，锯齿形毛刺对图像的影响程度随着工作距离与放大倍数的增大而增大，而扫描速度不同时，锯齿图形的波长不同、波幅一致；锯齿图形由电子束扫描与样品振动共同引起，当扫描速度为振动半周期的整数倍时可消除锯齿，据此理论在不同扫描速度下获取图像发现扫描速度为18.8 μs及其整数倍时，可消除本台电镜图像上的锯齿形毛刺；通过调节扫描角度，使长条形结构的长度方向与扫描方向水平时也可对锯齿进行抑制。本研究可为电镜工作者获取高质量图像提供一定参考。
关键词 扫描电镜；振动；锯齿形毛刺；扫描速度；扫描角度
中图分类号： 文献标识码：B doi:10.3969/j.issn.1000-6281.2021.04.017
Suppression and elimination of zigzag blurs in scanning electron microscopy image
PENG Yu
（College of Civil Engineering and Architecture, Hangzhou Zhejiang 310058，China）
Abstract Vibration, magnetic and electric fields can cause zigzag blurs in scanning electron microscopy (SEM) images. The pattern of the zigzag blurs as well as the methods to suppress and eliminate them were investigated, by adjusting the working distance, scan speed and scan angle. Results show that the increase in working distance and magnification make the zigzag blurs more serious in SEM images. The changes of scan speed alter the wave length of zigzag shape. The patterns show that the zigzag shapes are caused by the combination of electron beam scan and vibration, and theoretically, the zigzag can be eliminated when the scan speed is an integer multiple of the half period of vibration. According to this theory, a series of images with different scanning speeds were taken and compared, and it is found that the zigzag can be suppressed and eliminated when the scanning speed is 18.8μs or it’s integer multiples. Another effective way to suppress the zigzag is to adjust the scan angle to make the long direction of the long-strip structure horizontal to the vibration direction. This work provides helpful instructions to researchers in obtaining high-quality SEM images.
Keywords scanning electron microscopy；vibration；zigzag blur；scan speed；scan angle
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