基于氧化镓纳米线阵列的气体探测器研究

基于氧化镓纳米线阵列的气体探测器研究

钟 维，王鹏伟，韩晓冰，俞大鹏^*

（纳米结构与低维物理实验室，电子显微镜实验室， 北京大学 物理学院  北京，100871）

摘  要：氧化镓材料的电导在高温(400℃以上)下随环境气氛显著变化的电学性质可用于汽车尾气成分的检测。相比于薄膜材料, 氧化镓纳米线阵列具有更大的比表面，增加了与待测气体接触面积，有可能大幅提高探测器的灵敏度。本文直接利用生长在衬底上的图形化氧化镓纳米线阵列制成气体探测元件, 初步分析了纳米线未掺杂和掺杂条件下其对还原性气体的浓度变化的响应, 探讨了反应过程的机理，为后续研究打下了基础。

  关键词: 氧化镓纳米线；掺杂；高温；还原性气体 

  中图分类号：TB383；TP212；O612.3；TG115.21⁺5.3    文献标识码：A      doi:10.3969/j.1000-6281.2014.01.002

Gas sensor based on Ga₂O₃ nanowires

ZHONG Wei, WANG Peng-wei, HAN Xiao-bing, YU Da-peng*

（School of Physics, Peking University, Beijing 100871，China）

Abstract: The conductance of the gallium oxide that change in different ambient atmosphere at high temperature (above 400℃) makes it a promising material as high temperature gas sensor. Compared to gallium oxide film, gallium oxide nanowire arrays has huge surface-volume ratio for better contact with target gases. We fabricated gas sensors using doped and undoped gallium oxide nanowire patterns that were grown on substrate. Their response to reducing gases was tested and their sensor mechanism was studied.

Keywords: gallium oxide nanowire；doped；high temperature；reducing gas 

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