基于扫描电子显微镜的三维表面重建研究进展

基于扫描电子显微镜的三维表面重建研究进展

张雪成，张跃飞，孟文超，张  泽

（1. 浙江大学工程师学院，浙江 杭州 310015；2. 浙江大学材料科学与工程学院，浙江 杭州 310027；3. 浙江大学控制科学与工程学院，浙江 杭州 310027）

摘　要　　扫描电子显微镜（SEM）凭借高分辨率、大景深、快速成像等优势，广泛应用于材料学和生物学研究中的微观表征。尽管SEM图像呈现一定的立体感，其本质仍是二维图像，缺乏直接的三维信息。为实现更直观的视觉表达并精确测量样品表面特性，基于二维SEM图像的三维表面重建已成为显微视觉领域的核心课题。本文系统综述该领域近年来的研究进展，涵盖设备开发、算法优化及应用探索，重点分析单视角与多视角两种三维重建方法的特点与进展。同时，剖析当前技术瓶颈，并展望未来研究方向，以期推动该领域的进一步发展。

关键词　　扫描电子显微镜；三维重建；光度立体法；运动恢复结构；原位三维成像

中图分类号：TB302.3;TP391.4;O463；TG115.21     

文献标识码：A Doi:10.3969/j.issn.1000-6281.2025.06.010

Review of 3D surface reconstruction based on scanning electron microscopy

ZHANG Xuecheng¹, ZHANG Yuefei^2*, MENG Wenchao³, ZHANG Ze²

（1. Polytechnic Institute, Zhejiang University, Hangzhou Zhejiang 310015; 2. School of Materials Science and Engineering, Zhejiang University, Hangzhou Zhejiang 310027; 3. College of Control Science and Engineering, Zhejiang University, Hangzhou Zhejiang 310027, China）

Abstract　　The scanning electron microscope (SEM) is widely used in materials science and biology research due to its high resolution, large depth of field, and fast imaging capabilities. Although SEM images exhibit a sense of three-dimensionality, they are inherently two-dimensional and lack direct three-dimensional information. To achieve more intuitive visualization and accurate measurement of surface features, three-dimensional surface reconstruction from two-dimensional SEM images has become a key research focus in microscopic imaging. This paper presents a comprehensive review of recent advances in this field, including developments in instrumentation, algorithm optimizations, and emerging applications. Particular emphasis is placed on the feature and progress of two three-dimensional reconstruction methods: single-view and multi-view. Current technical challenges are also discussed, along with future research prospects, to support continued progress in this field.

Keywords　　scanning electron microscope; three-dimensional reconstruction; photometric stereo; structure from  motion; in-situ three-dimensional imaging

[1]KABOLI S, NOEL P, CLÉMENT D, et al. On high-temperature evolution of passivation layer in Li–10 wt.% Mg alloy via in situ SEM-EBSD [J]. Science Advances, 2020, 6(50): eabd5708.

[2]张昊翔, 丁青青, 姚霞, 等. 热处理对一种新型析出强化型奥氏体不锈钢显微组织与性能的影响[J]. 电子显微学报, 2024, 43(5): 540-548.

[3]李菲祺, 吕俊霞, 程晓鹏, 等. 不同取向镍基单晶高温合金650 ℃原位拉伸[J]. 电子显微学报, 2024, 43(3): 295-302.

[4]TATE M L K, A new age in scanning electron microscopy: Applications in the life sciences [J]. Science, 2017, 358(6368): 1344-1344.

[5]BILEN B, SENER L T, ALBENIZ I, et al. Determination of ultrastructural properties of human carotid atherosclerotic plaques by scanning acoustic microscopy, Micro-computer tomography, scanning electron microscopy and energy dispersive X-Ray spectroscopy [J]. Scientific Reports, 2019, 9: 679.

[6]VERNON-PARRY K D. Scanning electron microscopy: An introduction [J]. III-Vs Review, 2000, 13(4): 40-44.

[7]LIMANDRI S, GALVÁN JOSA V, VALENTINUZZI M C, et al. 3D scanning electron microscopy applied to surface characterization of fluorosed dental enamel [J]. Micron, 2016, 84: 54-60.

[8]BOEHLERT C J, LI H, WANG L, et al. Slip system characterization of inconel 718: Using in-situ scanning electron microscopy [J]. Advanced Materials & Processes, 2010, 168(11-12): 41-46.

[9]LU J, CHEN B, LIU X, et al. 3D microstructure reconstruction of casting aluminum alloy based on serial block-face scanning electron microscopy [J]. Journal of Alloys and Compounds, 2019, 778: 721-730.

[10]JUNG J M, YOO J H, JEONG H J, et al. Three-dimensional characterization of SiC particle-reinforced Al composites using serial sectioning tomography and thermo-mechanical finite element simulation [J]. Metallurgical and Materials Transactions A, 2014, 45(12): 5679-5690.

[11]YUAN H, DE MOORTÈLE B V, EPICIER T. Accurate post-mortem alignment for focused ion beam and scanning electron microscopy (FIB-SEM) tomography [J]. Ultramicroscopy, 2021, 228: 113265.

[12]VERHOEVEN G. Taking computer vision aloft – archaeological three-dimensional reconstructions from aerial photographs with photoscan [J]. Archaeological Prospection, 2011, 18(1): 67-73.

[13]TAFTI A P, KIRKPATRICK A B, ALAVI Z, et al. Recent advances in 3D SEM surface reconstruction [J]. Micron, 2015, 78: 54-66.

[14]TAFTI A P, HOLZ J D, BAGHAIE A, et al. 3DSEM++: Adaptive and intelligent 3D SEM surface reconstruction [J]. Micron, 2016, 87: 33-45.

[15]WOODHAM R J. Photometric stereo: A reflectance map technique for determining surface orientation from image intensity [C]//Image Understanding Systems and Industrial Applications I: vol. 0155. SPIE, 1979: 136-143.

[16]WOODHAM R J. Photometric method for determining surface orientation from multiple images [J]. Optical Engineering, 1980, 19(1): 139-144.

[17]BARBIERI G, DA SILVA F P. Acquisition of 3D models with submillimeter-sized features from SEM images by use of photogrammetry: A dimensional comparison to microtomography [J]. Micron, 2019, 121: 26-32.

[18]GONTARD L C, LÓPEZ-CASTRO J D, GONZÁLEZ-ROVIRA L, et al. Assessment of engineered surfaces roughness by high-resolution 3D SEM photogrammetry [J]. Ultramicroscopy, 2017, 177: 106-114.

[19]SIHVONEN T, REINIKAINEN S P. Image based evaluation of textured 3DSEM models [J]. Ultramicroscopy, 2022, 238: 113518.

[20]DRZAZGA W, PALUSZYNSKI J, SLOWKO W. Three-dimensional characterization of microstructures in a SEM [J]. Measurement Science and Technology, 2006, 17(1): 28-31.

[21]BORZUNOV A A, KARAULOV V Y, KOSHEV N A, et al. 3D surface topography imaging in SEM with improved backscattered electron detector: Arrangement and reconstruction algorithm [J]. Ultramicroscopy, 2019, 207: 112830.

[22]BEIL W, CARLSEN I C. Surface reconstruction from stereoscopy and “shape from shading” in SEM images [J]. Machine Vision and Applications, 1991, 4(4): 271-285.

[23]PALUSZYŃSKI J, SLÓWKO W. Surface reconstruction with the photometric method in SEM [J]. Vacuum, 2005, 78(2): 533-537.

[24]PINTUS R, PODDA S, VANZI M. An automatic alignment procedure for a four-source photometric stereo technique applied to scanning electron microscopy [J]. IEEE Transactions on Instrumentation and Measurement, 2008, 57(5): 989-996.

[25]PINTUS R, PODDA S, VANZI M. Improvements in automated photometric stereo 3D SEM[J]. Microscopy and Microanalysis, 2008, 14(S2): 608-609.

[26]VYNNYK T, SCHULTHEIS T, FAHLBUSCH T, et al. 3D-measurement with the stereo scanning electron microscope on sub-micrometer structures [J]. Journal of the European Optical Society - Rapid Publications, 2010, 5(10038s). DOI:10.2971/jeos.2010.10038s.

[27]赵以恒, 张宜旭, 刘陵恩, 等. 扫描电镜多角度图像采集系统研究[J]. 电子显微学报, 2024, 43(6): 701-710.

[28]MIYAMOTO A, CHEN D, KANEKO S. Bootstrapping de-shadowing and self-calibration for scanning electron microscope photometric stereo [J]. Measurement Science and Technology, 2014, 25(10): 105402.

[29]MIYAMOTO A, MATSUSE H, KOUTAKI G. Robust surface reconstruction by design-guided SEM photometric stereo [J]. Measurement Science and Technology, 2017, 28(4): 045405.

[30]BORZUNOV A A, LUKYANENKO D V, RAU E I, et al. Reconstruction algorithm of 3D surface in scanning electron microscopy with backscattered electron detector [J]. Journal of Inverse and Ill-posed Problems, 2021, 29(5): 753-758.

[31]BAYAZID S M, BRODUSCH N, GAUVIN R. Investigation of the effect of magnification, accelerating voltage, and working distance on the 3D digital reconstruction techniques [J]. Scanning, 2020, 2020: e3743267.

[32]NEGGERS J, HÉRIPRÉ E, BONNET M, et al. Principal image decomposition for multi-detector backscatter electron topography reconstruction [J]. Ultramicroscopy, 2021, 227: 113200.

[33]GIARDINO M, MENON D M N, JANNER D L. Regularization techniques for 3D surface reconstruction from four quadrant backscattered electron detector images [J]. Ultramicroscopy, 2023, 250: 113746.

[34]WZOREK M, CZERWINSKI A, RATAJCZAK J, et al. Depth measurements of etch-pits in GaN with shape reconstruction from SEM images[J]. Journal of Microscopy, 2010, 237(3): 242-245.

[35]ESTELLERS V, THIRAN J P, GABRANI M. Surface reconstruction from microscopic images in optical lithography [J]. IEEE Transactions on Image Processing, 2014, 23(8): 3560-3573.

[36]HEMMLEB M, BETTGE D, DRIEHORST I, et al.  3D surface reconstruction with segmented BSE detector: New improvements and application for fracture analysis in SEM[C]//European Microscopy Congress 2016: Proceedings. John Wiley & Sons, Ltd, 2016: 489-490.

[37]SLÓWKO W, WIATROWSKI A, KRYSZTOF M. Detection of secondary and backscattered electrons for 3D imaging with multi-detector method in VP/ESEM [J]. Micron, 2018, 104: 45-60.

[38]SLÓWKO W. Specific features of the miniature ionisation BSE multi-detector unit for 3D imaging in environmental conditions[J]. Micron, 2019, 126: 102752.

[39]GONTARD L C, SCHIERHOLZ R, YU S, et al. Photogrammetry of the three-dimensional shape and texture of a nanoscale particle using scanning electron microscopy and free software [J]. Ultramicroscopy, 2016, 169: 80-88.

[40]EULITZ M, REISS G. 3D reconstruction of SEM images by use of optical photogrammetry software [J]. Journal of Structural Biology, 2015, 191(2): 190-196.

[41]KOZIKOWSKI P. Extracting Three-dimensional information from SEM images by means of photogrammetry [J]. Micron, 2020, 134: 102873.

[42]TONDARE V N, VILLARRUBIA J S, VLADÁR A E. Three-dimensional (3D) nanometrology based on scanning electron microscope (SEM) stereophotogrammetry [J]. Microscopy and Microanalysis, 2017, 23(5): 967-977.

[43]BAGHAIE A, TAFTI A P, OWEN H A, et al. SD-SEM: Sparse-dense correspondence for 3D reconstruction of microscopic samples [J]. Micron, 2017, 97: 41-55.

[44]CAO S, ZENG C Y, LI Y Y, et al. Quantitative FIB/SEM three-dimensional characterization of a unique Ni₄Ti₃ network in a porous Ni_50.8Ti_49.2 alloy undergoing a two-step martensitic transformation [J]. Materials Characterization, 2020, 169: 110595.

[45]CEGUERRA A V, DAY A C, RINGER S P. Assessing the spatial accuracy of the reconstruction in atom probe tomography and a new calibratable adaptive reconstruction [J]. Microscopy and Microanalysis, 2019, 25(2): 309-319.

[46]SKAUDZIUS R, ZARKOV A, SELSKIS A, et al. Wet-chemistry synthesis of shape-controlled Ag₃PO₄ crystals and their 3D surface reconstruction from SEM imagery [J]. Powder Technology, 2019, 345: 26-34.

[47]KANG K W, PEREDA M D, CANAFOGLIA M E, et al. Uncertainty studies of topographical measurements on steel surface corrosion by 3D scanning electron microscopy [J]. Micron, 2012, 43(2): 387-395.

[48]OMRANI E, TAFTI A P, FATHI M F, et al. Tribological study in microscale using 3D SEM surface reconstruction [J]. Tribology International, 2016, 103: 309-315.

[49]GONTARD L C, BATISTA M, SALGUERO J, et al. Three-dimensional chemical mapping using non-destructive SEM and photogrammetry [J]. Scientific Reports, 2018, 8(1): 11000.

[50]TONDARE V N. A concept for three-dimensional particle metrology based on scanning electron microscopy and structure-from-motion photogrammetry [J]. Journal of Research of the National Institute of Standards and Technology, 2020, 125: 125014.

[51]PODOR R, LE GOFF X, LAUTRU J, et al. Direct observation of the surface topography at high temperature with SEM [J]. Microscopy and Microanalysis, 2020, 26(3): 397-402.

[52]ZHANG X, GUO G, LI Z, et al. Superalloys fracture process inference based on overlap analysis of 3D models[J]. Communications Engineering, 2024, 3(1): 1-10.

[53]TAFTI A P, KIRKPATRICK A B, HOLZ J D, et al. 3DSEM: A 3D microscopy dataset [J]. Data in Brief, 2016, 6: 112-116.