基于随机跳变方式的高分辨电子显微像的像差确定方法研究
王淑雅，符华南，林 芳*
（华南农业大学电子工程学院（人工智能学院），广东 广州 510642）
摘 要 针对高分辨透射电子显微镜（high-resolution transmission electron microscope， HRTEM）所拍摄的图像存在像差造成的分辨率下降问题，本文提出一种自动测量像差参数的方案：以相对随机的方式，模仿实验像与模拟像的人工对比过程，可以求解电镜像差。求得的像差结合改进单图重建波函数算法，可以去除图像的像差影响并获得单张图的波函数的相位像。本文运用模拟像验证后，方案与算法用于单层二硫化钼的实验 HRTEM 像，测得像差参数精度高，校正后的图像细节更优。本文算法计算精度好、效率高，有望应用于针对晶格像的像差测量问题。
关键词 高分辨电子显微像；像差测量；波函数重构
中图分类号：O463；TN153；TP391.41 文献标识码：A Doi:10.3969/j.issn.1000-6281.2025.05.008
Study on the aberration determination method for high-resolution electron microscopy based on the random parameter searching method
WANG Shuya, FU Hunan, LIN Fang*
（Department of applied physics, College of Electronic Engineering, South China Agricultural University, Guangzhou Guangdong 510642, China）
Abstract To address the problem of resolution degradation caused by aberrations in images captured by high-resolution transmission electron microscope (HRTEM), this paper proposes an automatic scheme for measuring aberration parameters. By mimicking the manual comparison between experimental image and simulated images in a relatively randomized manner, the method can estimate the electron microscope’s aberrations. The measured aberration parameters, combined with the exit-wave reconstruction algorithm, are then used to correct image distortions and recover the reconstructed phase image. The proposed scheme and algorithm are validated on simulated images and further applied to experimental HRTEM images of single-layer molybdenum disulfide, achieving highly accurate aberration measurements and improved phase image detail. The algorithm demonstrates good computational accuracy and high efficiency, showing promise for practical aberration measurement in lattice imaging.
Keywords high-resolution transmission electron microscope; aberration measurement; exit-wave function reconstruction
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