共聚焦显微拉曼光谱仪的新功能设计与实现
张秀英,彭其明,杨 阳
（南京工业大学柔性电子（未来技术）学院，江苏南京211816）
摘 要 基于激光共聚焦显微拉曼光谱仪光路，设计加入偏振片和半波片，实现微区角分辨偏振光谱测试功能，利用吉时利2400源表，设计并搭建可通电的样品夹持装置，实现微区电致发光光谱成像功能；采用黑磷和钙钛矿发光二极管作为实验样品，分别验证了微区角分辨偏振拉曼光谱测试功能和微区电致发光光谱成像功能；最后通过对钙钛矿薄膜器件的微区电致发光光谱成像结果和黑磷微区角分辨偏振拉曼光谱测试结果分析，证明设计的新功能可实现微区角分辨偏振拉曼光谱测试和微区电致发光光谱成像，为进一步研究二维材料晶体取向和半导体发光器件光电性能衰减老化机制提供了表征手段，供其他用户借鉴并推广使用。
关键词 拉曼光谱仪；光路设计；微区偏振光谱；微区电致发光；功能实现
中图分类号：N33；O433；O472
文献标识码：A doi:10.3969/j.issn.1000-6281.2024.04.009
Design and implementation of new function of the laser confocal micro-Raman spectrometer
ZHANG Xiuying，PENG Qiming，YANG Yang
(School of flexible electronics (future technologies), Nanjing Tech University, Nanjing Jiangsu 211816，China)
Abstract Based on the laser confocal micro-Raman spectrometer, an optical path was designed by adding a polarizer and a half wave plate to test the angle-resolved polarized (ARP) spectrum in the micro area. An electrified sample holder was designed using the Keithley 2400 source meter to obtain the micro-area electroluminescence spectrum of PeLEDs. In the experiment, black phosphorus was used to verify the functionality of the micro-area angle-resolved polarized Raman (ARPR) spectrum, and a PeLED was used to verify the mapping function of the micro-area electroluminescence spectrum. The results showed that the micro-area angle-resolved polarization Raman spectrum of black phosphorus was consistent with those in the literature, and the mapping of the micro-area electroluminescence spectrum of the PeLED was successfully obtained. This demonstrated that both newly designed functions were effective. The study provides a characterization method for further investigating the crystal orientation of two-dimensional materials and the aging mechanism of optoelectronic properties of semiconductor light-emitting devices. It can serve as a reference for other users.
Keywords Raman spectrometer; optical path design; micro-area polarization spectrum; micro-area electroluminescence; function realization
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