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低温散射式近场光学显微镜的研发

刘凡微*，陈思丹，张嘉未，陈欣中，毛寒青，黄思思，陈 曦*
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2022年 第41卷 第6期: 1000-6281（2022）06-627-07     下载地址：

低温散射式近场光学显微镜的研发

刘凡微*，陈思丹，张嘉未，陈欣中，毛寒青，黄思思，陈  曦*

（1.清华大学物理系低维量子物理国家重点实验室，北京100084；2.美国纽约州立大学石溪分校物理与天文系，美国纽约11794；3.中国科学院物理研究所，北京100190）

摘  要  散射式扫描近场光学显微镜（s-SNOM）是现代光学技术的重要分支。s-SNOM突破了衍射极限，在红外和太赫兹波段实现了纳米尺度成像。目前市面上商用的s-SNOM大多适合在常温常压环境下使用。而很多具有新奇物性的材料需要低温的测试环境。本文作者设计并搭建了一套采用液氦杜瓦维持低温环境的超高真空近场光学显微镜。该系统基于原子力显微镜（AFM），可以同时获得样品的形貌和近场光学成像。自制的压电驱动电机用于探针、样品和抛物面镜的位移控制。作者用标准样品TGQ1评估了s-SNOM的性能，并对NdNiO3薄膜的金属绝缘体相变（MIT）进行红外近场成像。测量结果展现了该系统在低温下的优异性能。低温s-SNOM技术能够为NdNiO3等关联氧化物薄膜相变过程提供介观尺度的丰富信息。

关键词   近场光学显微镜；低温；超高真空；金属绝缘体相变

中图分类号：TH742; TG115.21   文献标识码：A  doi:10.3969/j.issn.1000-6281.2022.06.008

 

Development of cryogenic scattering-type scanning near-field optical microscope

LIU Fan-wei1*，CHEN Si-dan1，ZHANG Jia-wei2，CHEN Xin-zhong2，MAO Han-qing3，HUANG Si-si3，CHEN Xi1*

(1.State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics, Tsinghua University, Beijing 100084；

2. Department of Physics and Astronomy, Stony Brook University, Stony Brook, NY 11794, USA；3.Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China)

AbstractScattering-type scanning near-field optical microscope (s-SNOM) has become an important tool among the modern optical techniques in the past decades. s-SNOM exceeds the diffraction limitation and allows the nanoscale imaging over a broad spectral range from infrared to terahertz frequencies. Currently, most commercial s-SNOM’s are operated at room temperature and atmospheric pressure. However, cryogenic environment is needed for materials with novel physical properties. Here we designed an ultrahigh-vacuum (UHV) cryogenic s-SNOM equipped with liquid helium Dewar. The s-SNOM system allows for simultaneous AFM topography and near-field optical imaging Based on the homemade AFM. The stages of tip, sample, and mirror are driven independently by homemade piezo positioners. The reliability of the s-SNOM is evaluated by standard test sample TGQ1, and further demonstrated by the infrared near-field imaging of MIT in NdNiO3 films. The corresponding measurements show the excellent results of our design s-SNOM under cryogenic environment. Cryogenic s-SNOM can provide valuable meso-scale information of phase transitions in more correlated oxides films.

Keywords   near-field optical microscope；cryogenic；ultra-high vacuum；metal-insulator transition

 

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