类金刚石纳米棒阵列的制备与场发射测试

李慧慧,何金龙*

金刚石纳米棒阵列的制备与场发射测试

李慧慧,何金龙*

(包头师范学院 物理科学与技术学院,内蒙古 包头  014030)

  在硅衬底上用磁过滤阴极真空弧(FCVAD)沉积系统沉积类金刚石(DLC)膜,以镍颗粒做掩膜,在电感耦合等离子体(ICP)系统中刻蚀DLC膜进而得到DLC纳米棒。经场发射检测,DLC纳米棒阵列的开启电场低至1.990 V·μm-1,阈值电场为4.312 V·μm-1,测量到的最大电流密度达到20.24 mA·cm-2时所需的外加电场为4.563V·μm-1。XPS和拉曼光谱确定了sp2相区域尺寸的增加,可增强场发射性能。

关键词 类金刚石;纳米棒;干法刻蚀;场发射

中图分类号:TQ164.8;TG115.21+5.3   文献标识码:A   doi:10.3969/j.issn.1000-6281.2021.04.006

 

Preparation and field emission behavior of DLC nanorod arrays by ICP etching technology 

LI Hui-hui,HE Jin-long*

(School of Physical Science and Technology, Baotou Teachers College,Baotou Inner Mongolia 014030,China)

Abstract Diamond-like carbon (DLC) films were deposited on Si supports by filtered cathodic vacuum arc deposition (FCVAD) system. Self-assembled Ni nanoparticals are used as a mask in the etching of inductively coupled plasma (ICP) system, using an oxygen plasma, highly aligned DLC nanorod arrays were fabricated. The as-prepared DLC nanorod arrays exhibit excellent field emission properties with a low turn-on field of 1.990 V·μm-1, threshold of 4.312 V·μm-1 and a high current density of 20.248 mA·cm-2 at 4.563 V·μm-1. Raman spectroscopy and X-ray photoelectron spectroscopy confirmed that larger conductive sp2 domains are formed in the as-etched DLC films, which play essential roles in the enhanced field emission properties for DLC nanorod arrays.

Keywords  DLC;nanorod;dry etching;field emission

 

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