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Fe3O4外延薄膜的制备与显微结构表征

高春阳，姚婷婷，江亦潇，陈春林，马秀良，叶恒强
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2022年 第41卷 第2期: 1000-6281（2022）02-105-06     下载地址：

Fe3O4外延薄膜的制备与显微结构表征

高春阳，姚婷婷，江亦潇，陈春林，马秀良，叶恒强

(1.中国科学院金属研究所 沈阳材料科学国家研究中心,辽宁 沈阳110016; 2.中国科学技术大学 材料科学与工程学院，辽宁 沈阳110016;3.季华实验室，广东 佛山528200)

摘  要   本文利用脉冲激光沉积（PLD）技术制备了Fe3O4{001}和{111}两种薄膜。Fe3O4 {001}薄膜是在SrTiO3{001}基片上通过PLD沉积直接生长的（直接生长法），而Fe3O4{111}薄膜是通过在SrTiO3{111}基片上PLD沉积Fe2O3{0001}薄膜后，再通过高温还原反应而获得（还原法）。XRD和XPS的研究结果表明Fe3O4{001}和{111}薄膜均为高纯度的单晶薄膜。透射电镜显微结构表征的结果表明，由还原法制备的Fe3O4{111}薄膜具有较高的质量，其反相畴界密度比直接生长法制备的Fe3O4{001}薄膜降低，主要为夹角是60°或120°的{110}型反相畴界。磁光克尔效应测试的结果表明，还原法制备的Fe3O4{111}薄膜具有较小的矫顽力(530 Oe)和较大的饱和磁化强度。

关键词   Fe3O4；薄膜制备；反相畴界；显微结构；透射电子显微术

中图分类号：N34; 076; 077; TG115. 21+5. 3  文献标识码：A　doi:10.3969/j.issn.1000-6281.2022.02.001

 

Preparation and microstructure characterization of epitaxial Fe3O4 thinfilms

GAO Chun-yang1，2, YAO Ting-ting1，3, JIANG Yi-xiao1，3, CHEN Chun-lin1，3*, MA Xiu-liang1, YE Heng-qiang3

(1.Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang Liaoning 110016; 2.School of Materials Science and Engineering，University of Science and Technology of China，Shenyang Liaoning 110016; 3.Ji Hua Laboratory, Foshan Guangdong 528200, China)

Abstract   Fe3O4 {001} and {111} films have been prepared by pulsed laser deposition (PLD). The Fe3O4 {001} films were directly grown on SrTiO3 {001} substrates by PLD deposition (direct growth method), while the Fe3O4 {111} films were obtained by PLD deposition of Fe2O3 {0001} thin films on SrTiO3 {111} substrates, followed by the high-temperature reduction reaction (reduction method). XRD and XPS results indicate that the Fe3O4 {001} and {111} films are single-crystal films with a high purity. TEM microstructure characterizations reveal that Fe3O4 {111} films prepared by the reduction method have a higher quality, and the density of antiphase boundaries is lower than that of the Fe3O4 {001} films prepared by the direct growth method. The antiphase boundaries are mainly {110} type with an intersection angle of 60° or 120°. The results of magneto-optical Kerr effect test suggest that the Fe3O4 {111} films prepared by the reduction method have a smaller coercivity (530 Oe) and a larger saturation magnetization.

Keywords   Fe3O4;antiphase boundaries; atomic structure; aberration-corrected transmission electron microscopy

 

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