单晶锗同晶面不同取向对脆塑转变影响的实验研究
马一鸣，李 珊*，杨晓京，李金乐单晶锗同晶面不同取向对脆塑转变影响的实验研究
（昆明理工大学机电工程学院，云南 昆明 650500）
摘 要 单晶锗为各向异性材料，为考察同一晶面不同取向对单晶锗材料脆塑转变的影响，本文以（110）晶面单晶锗片为实验样品，进行了微纳米力学仪器化压入和划入的测量实验及分析，并利用超高分辨热场发射扫描电子显微镜，对实验后的样品表面微观形貌进行了观察。结果表明，单晶锗材料的同一晶面上的不同取向产生裂纹及裂纹的扩展能力不同。在同一晶面上的不同取向进行刻划后的表面质量及脆塑转变效果也不同。以单晶锗片倒角边缘<111>晶向向右为0°正方向，实验涉及165°、45°以及-75°三个取向，在165°方向上最容易产生裂纹且最容易扩展，沿该方向刻划过程脆塑转变临界载荷和临界深度最大；在-75°方向上最不易产生裂纹及扩展，沿该方向刻划过程脆塑转变临界载荷和临界深度也最小。
关键词 单晶锗；压痕实验；划痕实验；脆塑转变
中图分类号：TN304.1 文献标识码：A doi:10.3969/j.issn.1000-6281.2020.04.004
Study of the effect of crystal orientation on brittle-plastic transformation of single crystal germanium
MA Yi-ming，LI Shan*, YANG Xiao-jing, LI Jin-le
（Faculty of Mechanical and Electrical Engineering, Kunming University of Science and Technology, Kunming Yunnan 650500, China）
Abstract Single crystal germanium is an anisotropic material. In order to investigate the effect of crystal orientations in the same crystal plane on the brittle-plastic transition of single crystal germanium materials, the single crystal germanium wafer showing the (110) crystal plane was used as an experimental sample to perform micro-nano mechanical instrumentation indentation and scratch experiments. The ultra-high resolution thermal field emission scanning electron microscope was used to observe the microstructure of the sample surface after the experiment. The results show that its ability to produce cracks and the ability of crack to propagate are different in different crystal directions on the same crystal plane of the single crystal germanium material. The surface quality and the effect on brittle-plastic transformation are also different after scratching in different crystal directions on the same crystal plane. Single crystal germanium wafer chamfered edge <111> crystal to the right is 0° positive direction. The experiment involved three crystal orientations of 165°, 45° and -75°. In the 165° direction, cracks are most likely to occur and propagate. The critical load and critical depth of the brittle-plastic transition are maximum along this direction. In the -75° direction, cracks are least likely to occur and propagate, and the critical load and critical depth of the brittle-plastic transition are minimum along this direction.
Keywords single crystal germanium; indentation test; scratch test; brittle-plastic transition
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