元素线系选择对硬质合金刀具涂层与基体过渡层能谱谱线解析的影响
詹美燕， 李春明，刘 杰元素线系选择对硬质合金刀具涂层与基体过渡层能谱谱线解析的影响
詹美燕1， 李春明1，刘 杰2
（1. 华南理工大学 材料学院，广东 广州510641；2. 广东工业大学 机电工程学院，广东 广州510006）
摘 要 对硬质合金刀具涂层和基体之间的过渡层进行了元素的能谱分析，研究了分析软件中钨元素（W）线系选择对半定量分析和不同元素线分布的影响。结果显示，当钨元素分别选用M线系和L线系进行分析时，会影响半定量结果；涂层中的Ti和基体中的W的计数率在线分布谱图上会呈现不同的变化趋势，选用M线系标定更符合实际情况。此外，由于涂层中Si的Ka特征X射线能量和基体中W的Ma特征X射线能量非常接近，可能造成Si和W谱峰误判，要根据具体情况具体分析，必要的时候选用软件的Truline功能可以纠正。
关键词 X射线能谱仪；硬质合金；涂层
中图分类号：O657.62
文献标识码：A doi:10.3969/j.issn.1000-6281.2020.01.006
Influence of different selection of spectral lines elements on the analysis of EDS spectra of transition layer between coating and matrix metal of cemented carbide
ZHAN Mei-yan1，LI Chun-ming1，LIU Jie2
（1.School of Materials Science and Engineering, South China University of Technology , Guangzhou 510640；2.School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China）
Abstract SEM/EDS was used for the analysis of the EDS spectra of transition layer between coating and matrix metal of cemented carbide. The influence of different spectrum lines element of tungsten (W) on the analysis of EDS spectra was researched. The results showed that the semi-quantitative results of EDS were different when calculated byMα and Lα of tungsten elements, respectively. The counting rate of Ti in coating and W in matrix metal also showed different trends during the analysis of the elements line distribution spectrum. The Mα calibration was moreaccordant with the actual situation. The calibrations of Si in coating and W in matrix on spectra of element line distribution were sometimes confused due to their similar spectrum peak position of Kα(Si) and Mα(W). However, this confusion can be corrected fortunately by the new function of Truline of the software when necessary.
Keywords EDS（energy dispersive spectrometer）cementedcarbide；coating
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